- Bib ID:
- 4037055
- Format:
- Book and Microform
- Author:
- Okamoto, S
- Description:
-
- Washington DC : National Aeronautics and Space Administration, [1986]
- 1 v.
- Series:
- NASA technical memorandum ; 88450.
- Notes:
- Distributed to depository libraries in microfiche.
- Reproduction:
- Microfiche. [Washington, D.C.? : National Aeronautics and Space Administration], 1987. 1 microfiche.
- Subject:
- Plasma-enhanced chemical vapor deposition
- Other authors/contributors:
- United States. National Aeronautics and Space Administration
- Available From:
- NASA
- Govt. Doc. Number:
- NAS 1.15:88450
- Copyright:
-
In Copyright
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- Reason for copyright status:
- Unable to determine date of publication or creation
Copyright status was determined using the following information:
- Material type:
- Literary Dramatic Musical
- Published status:
- Unpublished
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