Optical/laser microlithography
- Bib ID:
- 1423008
- Format:
- Journal
- Description:
-
- Bellingham, Wash. : SPIE-the International Society for Optical Engineering, c1988-c1995
- 8 v. : ill. ; 28 cm.
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering.
- Numbering Note:
-
- Issued 1992- in pts.
- Issue for 1988 lacks numerical designation but constitutes 1.
- Life Dates:
- [1] (2/4 Mar. 1988)-8 (22/24 Feb. 1995)
- Later Title:
- Optical microlithography (1996)
- Former Title:
- Optical microlithography
- Subject:
- Other authors/contributors:
- Society of Photo-optical Instrumentation Engineers
- Also Titled:
- Optical laser microlithography
- Copyright:
-
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- Reason for copyright status:
- Serials have an open range of dates.
Copyright status was determined using the following information:
- Material type:
- Literary Dramatic Musical
Copyright status may not be correct if data in the record is incomplete or inaccurate. Other access conditions may also apply. For more information please see: Copyright in library collections.
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