The molecular beam epitaxy of gallium nitride [microform]
- Bib ID:
- 3283685
- Format:
- Book and Microform
- Author:
- Johnston, Andrew Mark
- Description:
- 226 p.
- ISBN:
- 0591230712
- Summary:
-
The recent advances in the performance of the blue, green and near ultraviolet optoelectronic devices grown on gallium nitride (GaN) have made GaN a commercially significant material. Future advances in these devices will depend in part on an improved understanding of the chemistry and kinetics of the growth of GaN. An improved understanding of the chemistry may make it possible to engineer the growth conditions so as to reduce the defect density and improve the device performance. The kinetics of the growth of GaN using ammonia in a molecular beam epitaxy (MBE) environment are investigated using in situ reflection high energy electron diffraction (RHEED) and desorption mass spectrometry (DMS) with ammonia, and energetic ammonia and molecular nitrogen supplied by jet sources.
These experiments indicate that GaN dissociates with an activation energy of 3.4 $\pm$ 0.1 eV, that molecular nitrogen will dissociatively chemisorb on GaN with an activation energy of 6.7 $\pm$ 0.3 eV, that the ammonia dissociates on GaN in the presence of gallium with an activation energy of 0.66 $\pm$ 0.03 eV, and that the physisorption energy of molecular ammonia on GaN is approximately 0.09 $\pm$ 0.01 eV. Further, the ammonia chemisorbs to the GaN as NH$\sb2$ and the physisorbed gallium inhibits the growth perhaps by occupying the sites for ammonia chemisorption. These results are discussed in terms of a simple growth model. Under ammonia-rich conditions strong RHEED intensity oscillations have been observed. A procedure for growing films of GaN on sapphire capable of producing RHEED oscillations is outlined. Finally, some initial experiments on the lattice matched substrate manganese oxide (MnO) are presented.
- Notes:
-
- (UnM)AAI9715294
- Source: Dissertation Abstracts International, Volume: 57-12, Section: B, page: 7678.
- Adviser: Philip J. Cohen.
- Thesis (Ph.D.)--University of Minnesota, 1997.
- Reproduction:
- Microfiche. Ann Arbor, Mich.: University Microfilms International.
- Subject:
- Other authors/contributors:
- University of Minnesota
- Copyright:
-
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- Reason for copyright status:
- Since 2021 [Created/Published Date + 50 Years]
Copyright status was determined using the following information:
- Material type:
- Artistic
- Published status:
- Unpublished
- Creation date:
- 1971
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