Advances in resist technology and processing. - Society of Photo-optical Instrumentation Engineers; International Society for Hybrid Microelectronics (Bellingham, Wash. : SPIE--The International Society for Optical Engineering, 1985)
Vols. for 1999- issued in two parts.
Issued in cooperation with: International Society for Hybrid Microelectronics, 1985.
Keywords: Photoresists -- Congresses